Fire During the Production of Cvd Coating
Fire of vinyl chloride-made-air release pipe while CVD equipment in operation - With a vacuum pump for air discharging being operated, silane and hydrogen gases were mistakenly allowed to flow in during the operation of CVD equipment. This caused the gases to enter the discharging pipeline made of PVC, which caught fire.
Event Date
October 30, 1991
Record Quality Indicator
Region / Country
Event Initiating System
Classification of the Physical Effects
Nature of the Consequences
Causes
Cause Comments
The immediate cause for the production of the flammable gas mixture was a wrong operation of the gas flows. The root cause of this wrong operation is unknown.
Facility Information
Application Type
Application
Specific Application Supply Chain Stage
Components Involved
CVD reactor
Storage/Process Medium
Location Type
Location description
Industrial Area
Operational Condition
Consequences
Number of Injured Persons
6
Number of Fatalities
3
Lessons Learned
Lessons Learned
Unknown
Event Nature
Emergency Action
Unknown
Detonation
No
Deflagration
No
High Pressure Explosion
No
High Voltage Explosion
No
Source Category
References
References
Orignal source lost. RISCAD is closed.